XPS Chamber
This is a 12"-diameter chamber pumped by means of an ion pump and sublimation pump, operating at a base pressure of ~1×10-10 Torr. It is equipped with a computer-multiplexed Dycor uadrupole mass spectrometer for temperature-programmed desorption (TPD) experiments. It also contains a double-pass, cylindrical-mirror analyzer (CMA) system with co-axial electron gun and an X-ray source for collecting Auger and XPS data.
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